
TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
ZE 1006-528 | Carl Zeiss MicroImaging GmbH | Miroscope Axio Imager Z2 Vario | Particle emission (VDI 2083 part 9.1) (ISO Class 5) Particle per wafer and pass (PWP) |
Filters
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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
- All (52 Hits)
- Chemical resistance (VDI 2083 part 17) (3 Hits)
- Cleanability (VDI 2083 part 17) (3 Hits)
- Outgassing (VOC) (3 Hits)
- Particel emission (ISO 14644 part 14) (19 Hits)
- Particle emission (VDI 2083 part 9.1) (33 Hits)
-
Particle per wafer and pass (PWP) (1 Hits)