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TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
AS 1903-1104 | ASM AS GmbH & Co.KG | SIPLACE Wafer System Weight 3674kg Article number 519781 | Particel emission (ISO 14644 part 14) (ISO Class 3) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (3 Hits)
- ISO Class 3 or better (1 Hits)
- ISO Class 4 or better (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
Categories
- All (951 Hits)
- Cleanroom Facilities (279 Hits)
- Automation Components (242 Hits)
- Working Place and Operator (95 Hits)
- Materials (55 Hits)
- Process Equipment (65 Hits)
- Services (3 Hits)
- Energy Supply (212 Hits)