Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
FE 0607-355 Festo AG & Co. KG Pneumatic cylinder
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
FE 0705-402 Festo AG & Co. KG Pneumatic cylinder
MH 1
EDX analysis
Outgassing (Inorganic)
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
FE 0008-212 Festo AG & Co. Air bearing control unit
ABC-4P-24, LR-SDE-6-24
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
LE 0308-294 LEWA Herbert Ott GmbH+Co Membrane pump
G3H_Gr. 16
Contamination residues
FE 1407-713 Festo AG & Co. KG Solenoid valve MHA1-M1LCH-2/26-0.95-HC

Contamination residues
Particles (airborne)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.



Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test