TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
IN 2211-1364 INFICON GmbH Mobile vacuum leak tester - UL6000 Fab
manufacturing date: 10/2022
color: light gray / blue
Particel emission (ISO 14644 part 14) (ISO Class 6)
IN 2211-1364 INFICON GmbH Mobile vacuum leak tester - UL6000 Fab Plus
manufacturing date: 10/2022
color: light gray / blue
Particel emission (ISO 14644 part 14) (ISO Class 5)
EL 2211-1363 eltherm production GmbH ELPH-Cleanroom ID 40 mm
manufacturing date: week 41/2022
color: gray
Outgassing (VDI 2083 part 17)
Particel emission (ISO 14644 part 14) (ISO Class 4)
EL 2211-1363 eltherm production GmbH ELPH-Cleanroom ID 100 mm
manufacturing date: week 41/2022
color: gray
Outgassing (VDI 2083 part 17)
Particel emission (ISO 14644 part 14) (ISO Class 2)
BA 2303-1405 Barkey GmbH & Co. KG Barkey S-line C&G
manufacturing date: 2/8/2023
Charge number: 10693
Particel emission (ISO 14644 part 14) (ISO Class 1)
BA 2303-1405 Barkey GmbH & Co. KG Barkey plasmatherm C&G
manufacturing date: 2/15/2023
Charge number: 00010339R2
Particel emission (ISO 14644 part 14) (ISO Class 7)
BA 2303-1405 Barkey GmbH & Co. KG Barkey warming center C&G
manufacturing date: 2/7/2023
Charge number: 10692
Particel emission (ISO 14644 part 14) (ISO Class 7)
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*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

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