TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
VA 0907-492 Von Ardenne Anlagentechnik GmbH Cable Guiding System
Power drag chain, designed to application inside PVD and PECVD reactor chambers
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
KA 1008-531 TSUBAKI KABELSCHLEPP GmbH Energy guiding chain
TKR0200W50R55
length 2.13 m
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
IG 1303-640 igus GmbH e-chain E61.29.50.075.0

Particle emission (VDI 2083 part 9.1) (ISO Class 1)
IG 1504-755 igus GmbH Energy chain
e-skin
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
CP 1701-868 CP SYSTEM CO.,LTD Sabin chain
nsb045CR.75.R75/F
black
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
CP 1701-868 CP SYSTEM CO.,LTD Sabin chain
nsb020CR.20.R48/F
black
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.