TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 40 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 18kW 100920
74 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177299
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177301
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AP 1908-1138 APEVA CO., LTD. HEATING SLEAVE APEVA-HS-001
SAP: 100252247
Material number: A2000000233
Particel emission (ISO 14644 part 14) (ISO Class 1)
EL 2211-1363 eltherm production GmbH ELPH-Cleanroom ID 100 mm
manufacturing date: week 41/2022
color: gray
Outgassing (VDI 2083 part 17)
Particel emission (ISO 14644 part 14) (ISO Class 2)
BA 2303-1405 Barkey GmbH & Co. KG Barkey S-line C&G
manufacturing date: 2/8/2023
Charge number: 10693
Particel emission (ISO 14644 part 14) (ISO Class 1)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.