Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
AB 1211-619 ABB Engeneering (Shanghai) Ltd. Robot
IRB120 M2004
SN: 12-80596
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
YA 1205-598 YASKAWA Europe GmbH MOTOMAN roboter MPP3
(Delta kinematic)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
HA 1201-587 Hamilton Bonaduz AG Workstation
Microlab STAR
Computational Fluid Dynamics (CFD)
Particle emission (VDI 2083 part 9.1)
Particle per wafer and pass (PWP)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.