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TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
WI 2210-1352 | Wiferion GmbH | etaLINK 3000 | Outgassing (VDI 2083 part 17) Particel emission (ISO 14644 part 14) (ISO Class 4) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (1 Hits)
- ISO Class 4 or better (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
- All (59 Hits)
- Chemical resistance (VDI 2083 part 17) (3 Hits)
- Cleanability (VDI 2083 part 17) (3 Hits)
- ESD behaviour (DIN EN 61340-5-1) (1 Hits)
-
Outgassing (VDI 2083 part 17) (1 Hits)
- Outgassing (VOC) (3 Hits)
- Particel emission (ISO 14644 part 14) (26 Hits)
- Particle emission (VDI 2083 part 9.1) (33 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
Categories
- All (83 Hits)
- Cleanroom Facilities (66 Hits)
- Working Place and Operator (3 Hits)
- Materials (9 Hits)
- Process Equipment (4 Hits)
- Energy Supply (1 Hits)