TESTED DEVICE®
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.
Filters
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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (112 Hits)
- ISO Class 1 (2 Hits)
- ISO Class 2 or better (5 Hits)
- ISO Class 3 or better (12 Hits)
- ISO Class 4 or better (31 Hits)
- ISO Class 5 or better (58 Hits)
- ISO Class 6 or better (81 Hits)
- ISO Class 7 or better (99 Hits)
- ISO Class 8 or better (104 Hits)
- ISO Class 9 or better (106 Hits)
Subject Of Test
- All (278 Hits)
- Cleaning performance - particles (VDI 2083 part 17) (1 Hits)
- Computational Fluid Dynamics (CFD) (1 Hits)
- ESD behaviour (DIN EN 61340-5-1) (13 Hits)
- ESD behaviour (SEMI E78) (13 Hits)
- Expertise (8 Hits)
- Outgassing (VDI 2083 part 17) (4 Hits)
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Particel emission (ISO 14644 part 14) (112 Hits)
- Particle emission (VDI 2083 part 17) (1 Hits)
- Particle emission (VDI 2083 part 9.1) (153 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
- Particles (airborne) (1 Hits)
- Riboflavin test (VDMA information leaflet) (3 Hits)
Categories
- All (397 Hits)
- Cleanroom Facilities (89 Hits)
- Automation Components (112 Hits)
- Working Place and Operator (53 Hits)
- Materials (23 Hits)
- Process Equipment (27 Hits)
- Energy Supply (93 Hits)