TESTED DEVICE®
Report No. | Manufacturer | Product Name | Subject of Test (Result) |
---|---|---|---|
ZE 1006-528 | Carl Zeiss MicroImaging GmbH | Miroscope Axio Imager Z2 Vario | Particle emission (VDI 2083 part 9.1) (ISO Class 5) Particle per wafer and pass (PWP) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
- All (104 Hits)
- Chemical resistance (VDI 2083 part 17) (3 Hits)
- Cleanability (VDI 2083 part 17) (3 Hits)
- Cleaning performance - particles (VDI 2083 part 17) (1 Hits)
- ESD behaviour (DIN EN 61340-5-1) (14 Hits)
- Expertise (2 Hits)
- Outgassing (VDI 2083 part 17) (3 Hits)
- Outgassing (VOC) (3 Hits)
- Particel emission (ISO 14644 part 14) (49 Hits)
- Particle emission (VDI 2083 part 17) (2 Hits)
- Particle emission (VDI 2083 part 9.1) (53 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
- Riboflavin test (VDMA information leaflet) (1 Hits)