
TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
OR 0001-166 | Ortner c.l.s. GmbH | SMIF-Boxen | |
HU 0903-476 | Hubl GmbH Edelstahl-Blechverarbeitung | Covering Hubl Art.No. 06134 | Expertise |
AS 1903-1104 | ASM AS GmbH & Co.KG | SIPLACE Wafer System Weight 3674kg Article number 519781 | Particel emission (ISO 14644 part 14) (ISO Class 3) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (3 Hits)
- ISO Class 3 or better (1 Hits)
- ISO Class 4 or better (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
- All (3 Hits)
- ESD behaviour (DIN EN 61340-5-1) (1 Hits)
- Expertise (1 Hits)
- Particel emission (ISO 14644 part 14) (1 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
Categories
- All (1363 Hits)
- Cleanroom Facilities (479 Hits)
- Automation Components (251 Hits)
- Working Place and Operator (129 Hits)
- Materials (194 Hits)
- Process Equipment (76 Hits)
- Services (10 Hits)
- Energy Supply (224 Hits)