TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
ZE 1307-658 Zeiss Industrielle Messtechnik GmbH (Oberkochen) Coordinate measuring machine
MICURA
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1306-653 VAT Vakuumventile AG new
ATM Tür 076-50x336
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1306-653 VAT Vakuumventile AG new
9450X-XA24-AEY1
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.