
TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
OR 0001-166 | Ortner c.l.s. GmbH | SMIF-Boxen | |
ZE 1006-528 | Carl Zeiss MicroImaging GmbH | Miroscope Axio Imager Z2 Vario | Particle emission (VDI 2083 part 9.1) (ISO Class 5) Particle per wafer and pass (PWP) |
HA 1201-587 | Hamilton Bonaduz AG | Workstation Microlab STAR | Computational Fluid Dynamics (CFD) Expertise Particle emission (VDI 2083 part 9.1) Particle per wafer and pass (PWP) |
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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (3 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
- All (1361 Hits)
- Ab- / Desorption kinetic (VDI 2083 part 20 draft) (46 Hits)
- Absorption behaviour (DIN EN ISO 9073-6) (2 Hits)
- Acustic power (ISO 3741) (1 Hits)
- Air flow velocity (7 Hits)
- Air flow visualisation (7 Hits)
- Air permeability (1 Hits)
- Airborne Siloxanes (ISO 16017-1) (1 Hits)
- Biological cleanability (VDI 2083 part 17) (5 Hits)
- Biological resistance (ISO 846) (121 Hits)
- Chemical resistance (VDI 2083 part 17) (118 Hits)
- Cleanability (VDI 2083 part 17) (23 Hits)
- Cleaning performance - particles (VDI 2083 part 17) (5 Hits)
- Computational Fluid Dynamics (CFD) (1 Hits)
- Contamination residues (2 Hits)
- EDX analysis (1 Hits)
- Electrical Resistance (acc. to DIN EN 61340-2-3, DIN EN 61340-3-2 and DIN EN 61340-3-1) (4 Hits)
- ESD behaviour (DIN EN 61340-5-1) (71 Hits)
- ESD behaviour (SEMI E78) (13 Hits)
- Expertise (86 Hits)
- Extractable organic matter (IEST-RP-CC005.3) (1 Hits)
- Feasibility study (2 Hits)
- Gravimetric analysis (17 Hits)
- Isolation factor (1 Hits)
- Leakage testing (3 Hits)
- Microbicidity (ISO 22196) (16 Hits)
- Outgassing (Inorganic) (1 Hits)
- Outgassing (VDI 2083 part 17) (180 Hits)
- Outgassing (VOC) (46 Hits)
- Particel emission (ISO 14644 part 14) (309 Hits)
- Particle emission (VDI 2083 part 17) (140 Hits)
- Particle emission (VDI 2083 part 9.1) (539 Hits)
-
Particle per wafer and pass (PWP) (3 Hits)
- Particles (airborne) (8 Hits)
- Particles (sedimented) (5 Hits)
- Pressure conditions (7 Hits)
- PWIS – paint wetting impairment substances (PV 3.10.7) (1 Hits)
- Raman analysis (1 Hits)
- Resistance to corrosion (NaCl) (1 Hits)
- Riboflavin test (VDMA information leaflet) (78 Hits)
- Thin film contamination (4 Hits)
- Training (1 Hits)
Categories
- All (3 Hits)
- Automation Components (1 Hits)
- Working Place and Operator (1 Hits)
- Process Equipment (1 Hits)