TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-575654 V1 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
VA 1306-653 VAT Vakuumventile AG new
ATM Tür 076-50x336
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1306-653 VAT Vakuumventile AG new
9450X-XA24-AEY1
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
VA 0907-492 Von Ardenne Anlagentechnik GmbH Cable Guiding System
Power drag chain, designed to application inside PVD and PECVD reactor chambers
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
US 1011-537 USmatic GmbH & Co. KG CRUS - Conveyor System

Particle emission (VDI 2083 part 9.1) (ISO Class 6)
US 1011-537 USmatic GmbH & Co. KG Transfer system
Belt-Conveyor
Usmatic No. 229 550 00
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
UH 1001-505 Manz Automation AG Robot
DELTA CINECTAMIC
DR800/3
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
TS 2310-1468 Tsubakimoto Chain Co. Flatveyor ZP Type R100
manufacturing date: 5/2023
article number: Flatveyor ZP Type R100
Particel emission (ISO 14644 part 14) (ISO Class 2)
TS 2301-1383 Tsubakimoto Chain Co. Tsubaki Flatveyor 1 layer - FVZP
manufacturing date: 10/1/2022
article number: FLATVEYOR ZP Type
Particel emission (ISO 14644 part 14) (ISO Class 3)
TS 1908-1135 Tsubakimoto Chain Co. Tsubaki Cleanveyor 1 layer
Color White
Manufacturing date 5/28/2019
Particel emission (ISO 14644 part 14) (ISO Class 1)
TS 1908-1135 Tsubakimoto Chain Co. Tsubaki Cleanveyor 2 layers
Color White
Manufacturing date 5/28/2019
Particel emission (ISO 14644 part 14) (ISO Class 1)
TS 1904-1108 Tsubakimoto Chain Co. FLATVEYOR FV-2018-0068 FV070.1020
Color Black
Batch number FV-2018-0068
Particel emission (ISO 14644 part 14) (ISO Class 2)
TR 2306-1433 Trilux GmbH & Co. KG Two-length continuous row; 2x 7651IP HE DL 50-840ETDD VCGSB L150 01
manufacturing date: 5/2/2023
Size: 1474 x 67 x 83 mm
Particel emission (ISO 14644 part 14) (ISO Class 1)
TR 2210-1354 TREMCO CPG MALAYSIA SDN BHD Flowshield SL
manufacturing date: 7/28/2022
Biological resistance (ISO 846)
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 17) (ISO Class 2)
TR 2210-1354 TREMCO CPG MALAYSIA SDN BHD Flowshield CR
manufacturing date: 10/17/2022
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 17) (ISO Class 3)
TR 2210-1354 TREMCO CPG MALAYSIA SDN BHD Flowshield ESD CR Conductive
manufacturing date: 10/17/2022
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 17) (ISO Class 1)
TR 2209-1351 Trilux GmbH & Co. KG ArimoFit M73 DW19 IP 42-840 ETDD (TK 10216562)
manufacturing date: week 28/2022
batch number: ArimoFit M73 DW19 IP 42-840 ETDD (TK 10216562)
Particel emission (ISO 14644 part 14) (ISO Class 1)
TR 0805-433 Trilux GmbH & Co. KG Lighting system
FIDESCA SD
series
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
TR 0805-433 Trilux GmbH & Co. KG Lighting system
FIDESCA PM
series
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
TO 2211-1362 TOX PRESSOTECHNIK GmbH & Co. KG EXe-K 030.555.300.002 ElectricPowerDrive
manufacturing date: 5/2022
material: Aluminum anodized
Particel emission (ISO 14644 part 14) (ISO Class 5)
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*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

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