TESTED DEVICE®
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (8 Hits)
- ISO Class 2 or better (1 Hits)
- ISO Class 3 or better (1 Hits)
- ISO Class 4 or better (1 Hits)
- ISO Class 5 or better (4 Hits)
- ISO Class 6 or better (6 Hits)
- ISO Class 7 or better (6 Hits)
- ISO Class 8 or better (8 Hits)
- ISO Class 9 or better (8 Hits)
Subject Of Test
- All (90 Hits)
- Chemical resistance (VDI 2083 part 17) (3 Hits)
- Cleanability (VDI 2083 part 17) (3 Hits)
- Cleaning performance - particles (VDI 2083 part 17) (1 Hits)
- ESD behaviour (DIN EN 61340-5-1) (32 Hits)
- Expertise (1 Hits)
- Outgassing (VDI 2083 part 17) (2 Hits)
- Outgassing (VOC) (3 Hits)
-
Particel emission (ISO 14644 part 14) (8 Hits)
- Particle emission (VDI 2083 part 17) (3 Hits)
- Particle emission (VDI 2083 part 9.1) (79 Hits)
- Particle per wafer and pass (PWP) (1 Hits)
- Riboflavin test (VDMA information leaflet) (2 Hits)
Categories
- All (54 Hits)
- Cleanroom Facilities (12 Hits)
- Automation Components (18 Hits)
- Working Place and Operator (8 Hits)
- Materials (1 Hits)
- Process Equipment (3 Hits)
- Energy Supply (12 Hits)