TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 40 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 19 HT1-60 N047 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) PFG 6 HT1-60 N004 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Wafer gripper SWGm-6S 146x146x65
Material code: PEEK
Material type: Assembly with PEEK suction surface
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Spring plunger FSTIm M5-IG A 20

Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Spring plunger FSTIm M5-IG L 10

Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Spring plunger FSTIm M3-IG A 5

Particle emission (VDI 2083 part 9.1) (ISO Class 1)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.