
TESTED DEVICE®
Report No.![]() ![]() | Manufacturer![]() ![]() | Product Name![]() ![]() | Subject of Test (Result)![]() ![]() |
---|---|---|---|
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 18kW 100920 74 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 36 kW 177299 95 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AD 1811-1079 | Advantest Europe GmbH | Cooling system E2760 FAE 36 kW 177301 95 kg Water | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AS 1903-1104 | ASM AS GmbH & Co.KG | SIPLACE Wafer System Weight 3674kg Article number 519781 | Particel emission (ISO 14644 part 14) (ISO Class 3) |
AP 1908-1138 | APEVA CO., LTD. | HEATING SLEAVE APEVA-HS-001 SAP: 100252247 Material number: A2000000233 | Particel emission (ISO 14644 part 14) (ISO Class 1) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (12 Hits)
- ISO Class 1 (1 Hits)
- ISO Class 2 or better (1 Hits)
- ISO Class 3 or better (5 Hits)
- ISO Class 4 or better (6 Hits)
- ISO Class 5 or better (7 Hits)
- ISO Class 6 or better (11 Hits)
- ISO Class 7 or better (12 Hits)
- ISO Class 8 or better (12 Hits)
- ISO Class 9 or better (12 Hits)
Subject Of Test
- All (20 Hits)
- EDX analysis (1 Hits)
- Outgassing (Inorganic) (1 Hits)
- Outgassing (VDI 2083 part 17) (2 Hits)
- Outgassing (VOC) (1 Hits)
-
Particel emission (ISO 14644 part 14) (5 Hits)
- Particle emission (VDI 2083 part 9.1) (15 Hits)
Categories
- All (103 Hits)
- Cleanroom Facilities (29 Hits)
- Automation Components (6 Hits)
- Working Place and Operator (7 Hits)
- Materials (3 Hits)
-
Process Equipment (5 Hits)
- Energy Supply (53 Hits)