TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
AS 1903-1104 ASM AS GmbH & Co.KG SIPLACE Wafer System
Weight 3674kg
Article number 519781
Particel emission (ISO 14644 part 14) (ISO Class 3)
ME 0810-451 Memmert GmbH + Co. KG Universal oven
UFP 800
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 7)
ME 0801-423 Memmert GmbH + Co. KG Universal oven
UFP 500
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
Particle emission (VDI 2083 part 9.1) (ISO Class 7)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 40 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 18kW 100920
74 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177299
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177301
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AB 1811-1080 Advantest Europe GmbH “Rittal” control cabinet based Service Box
Manufacturing date: 10/10/2018; Housing: Rittal 7501000 DK; PDU: Rittal 7240220 DK; FanUnit: Rittal 7980100 DK
NAS: Synology RS217 with Intel DC S3510, 240 GB; PDU: Adam Hall 87471 IEC
AB 1811-1080 Advantest Europe GmbH “L.T. Cases” flight case based ServiceBox
Manufacturing date: 22/06/2018; Housing: L.T. Cases customized FlightCase; 2x FanUnit: AC Infinity AI-CP2H; Powersupply: MEANWELL GST60A12-P1J
NAS: Synology RS217 with Intel DC S3510, 240 GB; PDU: Adam Hall 87471 IEC; Switch: Netgear GS105GE
AP 1908-1138 APEVA CO., LTD. HEATING SLEAVE APEVA-HS-001
SAP: 100252247
Material number: A2000000233
Particel emission (ISO 14644 part 14) (ISO Class 1)
FE 0607-355 Festo AG & Co. KG Pneumatic cylinder
DNCB-32
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
FE 0705-402 Festo AG & Co. KG Pneumatic cylinder
MH 1
EDX analysis
Outgassing (Inorganic)
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
FE 0008-212 Festo AG & Co. Air bearing control unit
ABC-4P-24, LR-SDE-6-24
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1306-653 VAT Vakuumventile AG new
9450X-XA24-AEY1
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-533832 V1 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-575654 V2 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-575654 V1 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
VA 1411-739 VAT Vakuumventile AG Atmospheric door
ATM-Door 3D-746253_2D-756860
prototype
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (oval) SPOB1f 60x25 SI-55 G1/4-IG (green)
Material code: Silicone SI
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
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*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

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