TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
KU 1605-829 KUKA Roboter GmbH robot LBR iiwa 14 R820
workload: 14 kg
reach: 820 mm
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
KU 1701-874 KUKA Roboter GmbH robot KR6 R1820 (orange)
Weight: 168 kg
workload: 6 kg | range: 1820 mm
Particle emission (VDI 2083 part 9.1) (ISO Class 7)
IS 1103-547 isel Germany AG robot
IWH-BA13S14HDF-1
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
IS 1512-799 isel Germany AG robot
IWH-BA13D14HDF-3
silvergrey
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
HA 1201-587 Hamilton Bonaduz AG Workstation
Microlab STAR
Computational Fluid Dynamics (CFD)
Expertise
Particle emission (VDI 2083 part 9.1)
Particle per wafer and pass (PWP)
KU 1401-685 KUKA Roboter GmbH Serie of the robots
KR 6/10 AGILUS sixx CR
Particle emission (VDI 2083 part 9.1) (ISO Class 2)
FA 1906-1035 FANUC Europe GmbH Scara robot SR-6iA in yellow paint / 6kg (A05B-1117-B201)
Weight 30 kg Max. payload 6 kg Reach horizontal 65 cm Reach vertical 21 cm
Mechanical unit number R18X06468 Controller number E18X33203 Color Yellow Manufacturing date 10/29/2018
ESD behaviour (DIN EN 61340-5-1)
ESD behaviour (SEMI E78)
Particel emission (ISO 14644 part 14) (ISO Class 9)
FA 1905-1114 FANUC Europe GmbH Scara robot SR-3iA in yellow paint / 3kg (A05B-1116-B201)
Weight: 19 kg; Max. payload: 3 kg; Reach horizontal: 40 cm; Reach vertical: 20 cm
Mechanical unit number: R18600885; Controller number: E18532404; Color: Yellow; Manufacturing date: 5/30/2018
ESD behaviour (DIN EN 61340-5-1)
ESD behaviour (SEMI E78)
Particel emission (ISO 14644 part 14) (ISO Class 9)
DE 1409-725 DENSO WAVE Incorporated Robot series VS050S2-AV6-R1

Expertise
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
DE 1511-792 DENSO WAVE Incorporated Robot VS050S2-AV6-R1

Riboflavin test (VDMA information leaflet)
FA 1602-807 FANUC Robotics Europe S.A. Robot LR Mate 200iD/7LC (yellow)
Type A05B-1142-B301
Version: Long arm | Payload: 7 kg | Range: 901 mm
ESD behaviour (DIN EN 61340-5-1)
ESD behaviour (SEMI E78)
FA 1602-806 FANUC Robotics Europe S.A. Robot LR Mate 200iD/7LC (white)
Type A05B-1142-B221
Particle emission (VDI 2083 part 9.1) (ISO Class 7)
FA 1602-808 FANUC Robotics Europe S.A. Robot LR Mate 200iD/7LC (white)
Type A05B-1112-3321
Version: Long arm | Payload: 7 kg | Range: 901 mm
ESD behaviour (DIN EN 61340-5-1)
ESD behaviour (SEMI E78)
FA 1602-806 FANUC Robotics Europe S.A. Robot LR Mate 200iD/7LC (white)
Type A05B-1112-3321
Version: Long arm | Payload: 7 kg | Range: 901 mm
Particle emission (VDI 2083 part 9.1) (ISO Class 7)
KU 1607-835 KUKA Roboter GmbH Robot KR3 R540 (Prototyp)
Workload: 3 kg / reach: 540 mm
Color: white
ESD behaviour (DIN EN 61340-5-1)
ESD behaviour (SEMI E78)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
EL 1004-519 Schneider Electric Automation GmbH (Marktheidenfeld) Robot
PacDrive
P4s(b)-x-CW-15-1200
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
FA 0612-374 FANUC Robotics Europe S.A. Robot
P-50i
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
FA 0612-374 FANUC Robotics Europe S.A. Robot
M710iC
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
FA 1404-700 FANUC Robotics Europe S.A. Robot
LR-Mate 200iD/7LC
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
FA 1404-700 FANUC Robotics Europe S.A. Robot
LR-Mate 200iD/7C
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

Categories

Years