TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
LE 0308-294 LEWA Herbert Ott GmbH+Co Membrane pump
G3H_Gr. 16
M211S
Contamination residues
FE 1407-713 Festo AG & Co. KG Solenoid valve MHA1-M1LCH-2/26-0.95-HC

Contamination residues
Particles (airborne)
HA 0810-453 hawo GmbH Vacuum impulse welding machine
hv 460 AP/V
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
076-50x336
Prototype
Particle emission (VDI 2083 part 9.1)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
L-VAT 07512-UA24
Particle emission (VDI 2083 part 9.1)
VA 1306-653 VAT Vakuumventile AG new
ATM Tür 076-50x336
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1306-653 VAT Vakuumventile AG new
9450X-XA24-AEY1
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-533832 V1 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-575654 V2 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
VA 1401-690 VAT Vakuumventile AG Transfer valve
Valve-575654 V1 (Prototype)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
VA 1411-739 VAT Vakuumventile AG Atmospheric door
ATM-Door 3D-746253_2D-756860
prototype
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (oval) SPOB1f 60x25 SI-55 G1/4-IG (green)
Material code: Silicone SI
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FGA 14 SI-HD (white)
Material code: Silicone SI-HD
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 2)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) SPB4f 30 SI-55 SC080 (green)
Material code: Silicone SI
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
SC 1606-831 J. Schmalz GmbH Bell-shaped suction cup SAXM 60 ED-85 G1/4-AG (blue)
Material code: Elastodur
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 19 HT1-60 N047 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 3 HT1-60 N055 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) PFG 6 HT1-60 N004 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Wafer gripper SWGm-6S 146x146x65
Material code: PEEK
Material type: Assembly with PEEK suction surface
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Thin glass gripper STGG S 170x105
Material code: PEEK
Material type: Assembly with PEEK suction surface
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

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