Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
HU 0903-476 Hubl GmbH Edelstahl-Blechverarbeitung Covering
Hubl Art.No. 06134
SP 0006-177 Spetec GmbH Flow Box
Spetec Flow Box
ESD behaviour (DIN EN 61340-5-1)
Isolation factor
FE 0705-402 Festo AG & Co. KG Pneumatic cylinder
MH 1
EDX analysis
Outgassing (Inorganic)
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
LE 0308-294 LEWA Herbert Ott GmbH+Co Membrane pump
G3H_Gr. 16
Contamination residues
FE 1407-713 Festo AG & Co. KG Solenoid valve MHA1-M1LCH-2/26-0.95-HC

Contamination residues
Particles (airborne)
SC 1705-915 Schwer Fittings GmbH ZeroCon Verschraubung: ZeroCon Anschweißflansch 1 ½“; Manufacturing date: 2/2017; Material: stainless steel; Chargennummer: 17-163c, 17-164c, 17-165c
ZeroCon Verschraubung: ZeroCon Verschraubung Orbital D 23 x 1; Manufacturing date: 7/2016; Material: stainless steel; Chargennummer: 16-18665, 16-15442, 16-11598
Cleanability (VDI 2083 part 17)
OR 0001-166 Ortner c.l.s. GmbH SMIF-Boxen

AP 0505-326 AP&S GmbH Air Heating System
type LSE
BO 0103-233 Robert Bosch GmbH (Werk Blaichach) Inspection glass
for Minienvironments
Material Makrolon
BO 0103-233 Robert Bosch GmbH (Werk Blaichach) Inspection glass
for Minienvironments
Material Floatglas
SP 0606-351 Spetec GmbH Laminar Flow Box

*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.



Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test