TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
OR 0001-166 Ortner c.l.s. GmbH SMIF-Boxen

AP 0505-326 AP&S GmbH Air Heating System
type LSE
BO 0103-233 Robert Bosch GmbH (Werk Blaichach) Inspection glass
for Minienvironments
Material Makrolon
BO 0103-233 Robert Bosch GmbH (Werk Blaichach) Inspection glass
for Minienvironments
Material Floatglas
SP 0606-351 Spetec GmbH Laminar Flow Box

SC 1705-915 Schwer Fittings GmbH ZeroCon Verschraubung: ZeroCon Anschweißflansch 1 ½“; Manufacturing date: 2/2017; Material: stainless steel; Chargennummer: 17-163c, 17-164c, 17-165c
ZeroCon Verschraubung: ZeroCon Verschraubung Orbital D 23 x 1; Manufacturing date: 7/2016; Material: stainless steel; Chargennummer: 16-18665, 16-15442, 16-11598
Cleanability (VDI 2083 part 17)
Expertise
LE 0308-294 LEWA Herbert Ott GmbH+Co Membrane pump
G3H_Gr. 16
M211S
Contamination residues
FE 1407-713 Festo AG & Co. KG Solenoid valve MHA1-M1LCH-2/26-0.95-HC

Contamination residues
Particles (airborne)
FE 0705-402 Festo AG & Co. KG Pneumatic cylinder
MH 1
EDX analysis
Outgassing (Inorganic)
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
SP 0006-177 Spetec GmbH Flow Box
Spetec Flow Box
Basic
ESD behaviour (DIN EN 61340-5-1)
Isolation factor
HU 0903-476 Hubl GmbH Edelstahl-Blechverarbeitung Covering
Hubl Art.No. 06134
Expertise
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 40 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
FE 0008-212 Festo AG & Co. Air bearing control unit
ABC-4P-24, LR-SDE-6-24
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
DE 1808-1060 F & K DELVOTEC Bondtechnik GmbH Ultrasonic Wire Bonder M17 D Indexer
Weight 1600 kg
manufacturing date 2018
Particel emission (ISO 14644 part 14) (ISO Class 6)
AD 1805-1043 Advantest Europe GmbH Cooling system E2760 FCS
Heat transfer medium: Water
Weight: 247 kg
Particel emission (ISO 14644 part 14) (ISO Class 6)
ME 1811-1085 Memmert GmbH + Co. KG Universal Oven UF1060
Color: stainless steel
Manufacturing date: 9/2018
Particel emission (ISO 14644 part 14) (ISO Class 6)
AD 1805-1043 Advantest Europe GmbH Cooling system E2760 FAE 36 kW
Heat transfer medium: Water
Weight: 95 kg
Particel emission (ISO 14644 part 14) (ISO Class 7)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
076-50x336
Prototype
Particle emission (VDI 2083 part 9.1)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
L-VAT 07512-UA24
Particle emission (VDI 2083 part 9.1)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

Categories

Years