TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
FE 0008-212 Festo AG & Co. Air bearing control unit
ABC-4P-24, LR-SDE-6-24
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
Particle emission (VDI 2083 part 9.1) (ISO Class 6)
VA 1411-739 VAT Vakuumventile AG Atmospheric door
ATM-Door 3D-746253_2D-756860
prototype
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
SC 1606-831 J. Schmalz GmbH Bell-shaped suction cup SAXM 60 ED-85 G1/4-AG (blue)
Material code: Elastodur
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (oval) SPOB1f 60x25 SI-55 G1/4-IG (green)
Material code: Silicone SI
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 19 HT1-60 N047 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 3 HT1-60 N055 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FGA 14 SI-HD (white)
Material code: Silicone SI-HD
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 2)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) PFG 6 HT1-60 N004 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) SPB4f 30 SI-55 SC080 (green)
Material code: Silicone SI
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 18kW 100920
74 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177299
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
AD 1811-1079 Advantest Europe GmbH Cooling system E2760 FAE 36 kW 177301
95 kg
Water
Particel emission (ISO 14644 part 14) (ISO Class 3)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 100 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
EL 1603-812 eltherm production GmbH Heating jacket ELPH-Cleanroom
ID 40 mm
Outgassing (VDI 2083 part 17)
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Large-area gripper system FM-SW 76x22 0.4 P0.9
Material code: Foam P
Material type: Assembly with foam
Particle emission (VDI 2083 part 9.1) (ISO Class 2)
SC 1606-831 J. Schmalz GmbH Large-area gripper system FMC-SW-HD 400 9R13
Material code: Foam 0 + FPE
Material type: Assembly with foam
Particle emission (VDI 2083 part 9.1) (ISO Class 4)
SC 1606-831 J. Schmalz GmbH Large-area gripper system FX-SW 120x60 N10
Material code: Foam N
Material type: Assembly with foam
Particle emission (VDI 2083 part 9.1) (ISO Class 2)
FE 0607-355 Festo AG & Co. KG Pneumatic cylinder
DNCB-32
Particle emission (VDI 2083 part 9.1) (ISO Class 5)
FE 0705-402 Festo AG & Co. KG Pneumatic cylinder
MH 1
EDX analysis
Outgassing (Inorganic)
Outgassing (VOC)
Particle emission (VDI 2083 part 9.1) (ISO Class 3)
AS 1903-1104 ASM AS GmbH & Co.KG SIPLACE Wafer System
Weight 3674kg
Article number 519781
Particel emission (ISO 14644 part 14) (ISO Class 3)
12
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

Subject Of Test

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