TESTED DEVICE®

Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
SC 1606-831 J. Schmalz GmbH Wafer gripper SWGm-6S 146x146x65
Material code: PEEK
Material type: Assembly with PEEK suction surface
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
SC 1606-831 J. Schmalz GmbH Bellows suction cup (round) FG 19 HT1-60 N047 (blue)
Material code: HT1
Material type: Elastomer
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
076-50x336
Prototype
Particle emission (VDI 2083 part 9.1)
VA 1206-605 VAT Vakuumventile AG Atmospheric door
L-VAT 07512-UA24
Particle emission (VDI 2083 part 9.1)
12
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.

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Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*

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