Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particel emission (ISO 14644 part 14)
| Velocity 40 % Attached payload: 25 kg Axis 1: 170 bis -170 ° Axis 2: -75.58 bis -83.70 ° Axis 3: 159.7 bis -61.9 ° Axis 4: -195-195 ° Axis 5: 95.4 bis -97 ° Axis 6: -270-270 ° | ISO 14644-1 | / | ISO Class 5 | | certificate
1
en
(11-12-17)
certificate
2
en
(18-10-22)
certificate
3
en
(18-10-22)
QLogo
1
en
(18-10-22)
QLogo
2
en
(18-10-22)
statement
1
en
(18-10-22)
statement
2
en
(18-10-22)
statement
3
en
(18-10-22)
|
Velocity 80 % Attached payload: 25 kg Axis 1: 170 bis -170 ° Axis 2: -75.58 bis -83.70 ° Axis 3: 159.7 bis -61.9 ° Axis 4: -195-195 ° Axis 5: 95.4 bis -97 ° Axis 6: -270-270 ° | ISO 14644-1 | / | ISO Class 5 | |
ESD behaviour (SEMI E78)
| electrostatic level; Year node: 2006 / 70 nm electrostatic level; Limit value: 80 V/cm Test result; Measuring value: 43 V/cm Test result; Maximum single: 156 V/cm | | certificate
1
en
(18-10-22)
QLogo
1
en
(18-10-22)
QLogo
2
en
(18-10-22)
statement
1
en
(18-10-22)
|
ESD behaviour (DIN EN 61340-5-1)
| Operating voltage: 10 V Resistance measured: < 2 x 10⁵ Ω | Compliance with limit valueas per DIN EN 61340-5-1: | / | fulfilled | | certificate
1
en
(18-10-22)
QLogo
1
en
(18-10-22)
QLogo
2
en
(18-10-22)
statement
1
en
(18-10-22)
|