Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particel emission (ISO 14644 part 14)
| Moving axes 1 - 6 Velocity 50 % of max. Attached payload 7 kg Axis 1 -157 to 157 ° Axis 2 -110 to 104 ° Axis 3 -135 to 155 ° Axis 4 -200 to 200 ° Axis 5 -105 to 116 ° Axis 6 -360 to 360 ° Pause between cycles 1 s | ISO 14644-1 | / | ISO Class 4 | | certificate
1
en
(28-07-26)
statement
1
en
(28-07-26)
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Moving axes 1 - 6 Velocity 100 % of max. Attached payload 7 kg Axis 1 -157 to 157 ° Axis 2 -110 to 104 ° Axis 3 -135 to 155 ° Axis 4 -200 to 200 ° Axis 5 -105 to 116 ° Axis 6 360 to 360 ° Pause between cycles 1 s | ISO 14644-1 | / | ISO Class 4 | |
ESD behaviour (SEMI E78)
| Tool weight 0 kg Axis 1 -155 to 155 ° Axis 2 -120 to 38 ° Axis 3 -150 to 150 ° Axis 4 -195 to 195 ° Axis 5 -120 to 120 ° Axis 6 -310 to 355 ° Velocity 80 % of max. Operating state on Year node 2004 / 90 nm Limit value 100 V/cm Mean value 44 V/cm Max. measured single value 130 V/cm | SEMI E78-0912 | / | year node 2004 / 90 nm fulfilled | | certificate
1
en
(28-07-26)
statement
1
de
(28-07-26)
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