Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particle emission (VDI 2083 part 9.1)
| 0.4 m/s | DIN EN ISO 14644-1 | / | ISO Class 8 | US FED 209E | / | US Class 100000 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.2 m/s | DIN EN ISO 14644-1 | / | ISO Class 6 | US FED 209E | / | US Class 1000 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.12 m/s | DIN EN ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.1 m/s | DIN EN ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.04 m/s | DIN EN ISO 14644-1 | / | ISO Class 4 | US FED 209E | / | US Class 10 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.02 m/s | DIN EN ISO 14644-1 | / | ISO Class 4 | US FED 209E | / | US Class 10 | | / | | | certificate
1
de
statement
1
de
|