Particle emission (VDI 2083 part 9.1)
| frame: - frequency (sinusoidal oscillation): 50 Hz oscillation velocity 22 µm/s oscillation acceleration: 7 mm/s² oscillation of the system: 0,07 µm | ISO 14644-1 | / | ISO Class 1 | US FED 209E | / | US Class - | | certificate
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statement
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(18-05-21)
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