| Particel emission (ISO 14644 part 14)
| frequency (sinusoidal oscillation): 50 Hz
oscillation velocity 1,7782 mm/s
oscillation acceleration: 0,5238 m/s²
oscillation of the system: 0,0238 mm
| | ISO 14644-1 | / | ISO Class 1 | | certificate
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certificate
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statement
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statement
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