Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particle emission (VDI 2083 part 9.1)
| 3000 U/min | DIN EN ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | / | | | certificate
1
de
|
Particle emission (VDI 2083 part 9.1)
| 2000 U/min | DIN EN ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | / | | | certificate
1
de
|
Particle emission (VDI 2083 part 9.1)
| 1000 U/min | DIN EN ISO 14644-1 | / | ISO Class 2 | | / | | | / | | | certificate
1
de
|