TESTED DEVICE®

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Company

ASM AS GmbH & Co.KG
 
Rupert-Mayer-Straße 44
81379 München

Contact Person

Werner Pfaffenberger
Phone +49 (0) 89 20800-40914
Email werner.pfaffenberger@asmpt.com
Website

Test Object

SIPLACE Wafer System
Weight 3674kg
Article number 519781
Q-Id AS 1903-1104
Year 2019
Comments Manufacturing date 2017
Category Wafer Equipment

Tests And Results

Subject of Test Parameter Assessment for / Results Documents
(valid to)
Particel emission (ISO 14644 part 14) Air Cleanliness Class 7
Maximum velocity x axis 2,5 m/s
Maximum velocity y axis 2,5 m/s
Maximum acceleration x axis 40,0 m/s2
Maximum acceleration y axis 30 m/s2
Theorethical placement capacity 78640 BE/h
Vaccuum pump active
Venturi operation active
certificate 1 en
(01-08-24)
certificate 1 de
(01-08-24)
QLogo 1 en
(01-08-24)
QLogo 2 en
(01-08-24)
statement 1 en
(01-08-24)
statement 1 de
(01-08-24)