Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particle emission (VDI 2083 part 9.1)
| 2 m/s / 3,81 m/s acceleration 9.6 m/s2 traverse path 1400 mm hold point every 100 mm | DIN EN ISO 14644-1 | / | ISO Class 6 | US FED 209E | / | US Class 1000 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 3.81 m/s acceleration 9.6 m/s2 traverse path 1500 mm hold point after 750 mm | DIN EN ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 3.81 m/s acceleration 9.6 m/s2 traverse path 1400 mm hold point every 100 mm | DIN EN ISO 14644-1 | / | ISO Class 6 | US FED 209E | / | US Class 1000 | | / | | | certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| 0.18 m/s acceleration 9.6 m/s2 traverse path 1500 mm hold point after 750 mm | DIN EN ISO 14644-1 | / | ISO Class 4 | US FED 209E | / | US Class 10 | | / | | | certificate
1
de
statement
1
de
|