| Subject of Test | Parameter | Assessment for / Results | Documents
(valid to) |
| Particel emission (ISO 14644 part 14)
| Moving axes 1 - 6
Velocity 50 % of max.
Attached payload 7 kg
Axis 1 -157 to 157 °
Axis 2 -110 to 104 °
Axis 3 -135 to 155 °
Axis 4 -200 to 200 °
Axis 5 -105 to 116 °
Axis 6 -360 to 360 °
Pause between cycles 1 s
| | ISO 14644-1 | / | ISO Class 4 | | certificate
1
en
(28-07-26)
statement
1
en
(28-07-26)
|
Moving axes 1 - 6
Velocity 100 % of max.
Attached payload 7 kg
Axis 1 -157 to 157 °
Axis 2 -110 to 104 °
Axis 3 -135 to 155 °
Axis 4 -200 to 200 °
Axis 5 -105 to 116 °
Axis 6 360 to 360 °
Pause between cycles 1 s
| | ISO 14644-1 | / | ISO Class 4 | |
| ESD behaviour (SEMI E78)
| Tool weight 0 kg
Axis 1 -155 to 155 °
Axis 2 -120 to 38 °
Axis 3 -150 to 150 °
Axis 4 -195 to 195 °
Axis 5 -120 to 120 °
Axis 6 -310 to 355 °
Velocity 80 % of max.
Operating state on
Year node 2004 / 90 nm
Limit value 100 V/cm
Mean value 44 V/cm
Max. measured single value 130 V/cm
| | SEMI E78-0912 | / | year node 2004 / 90 nm fulfilled | | certificate
1
en
(28-07-26)
statement
1
de
(28-07-26)
|
