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Cable Guiding System / Power drag chain, designed to application inside PVD and PECVD reactor chambers
Company
Von Ardenne Anlagentechnik GmbH
Plattleite 19/29
01324 Dresden
Contact Person
Mr. Andreas Heisig
Phone
+49 351 2637 607
Email
Heisig.Andreas@vonardenne.biz
Website
www.vonardenne.biz
Test Object
Cable Guiding System
Power drag chain, designed to application inside PVD and PECVD reactor chambers
Q-Id
VA 0907-492
Year
2009
Comments
Category
Cable Guiding System
Tests And Results
Subject of Test
Parameter
Assessment for / Results
Documents
(valid to)
Particle emission (VDI 2083 part 9.1)
0.5 m/s
acceleration 1.0 m/s2
configuration horizontal
incline 7°
ISO 14644-1
/
ISO Class 1
/
/
certificate 1 de
statement 1 de