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Theta-Z-Stage with 100 µm Piezo / M-900K060
Company
Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstrasse 1
76228 Karlsruhe
Contact Person
Mr. Steffen Arnold
Phone
+49-721-48-46-235
Email
S.Arnold@pi.ws
Website
www.physikinstrumente.de
Test Object
Theta-Z-Stage with 100 µm Piezo
M-900K060
Q-Id
PI 0208-267
Year
2002
Comments
Category
Transfer Systems and Bearing
Tests And Results
Subject of Test
Parameter
Assessment for / Results
Documents
(valid to)
Particle emission (VDI 2083 part 9.1)
specified by customer
DIN EN ISO 14644-1
/
ISO Class 5
US FED 209E
/
US Class 100
/
certificate 1 de
statement 1 de