Particle emission (VDI 2083 part 9.1)
| frequency (sinusoidal oscillation): 5 - 50 Hz oscillation velocity 605 µm/s oscillation acceleration: 190 mm/s² oscillation of the system: 2 µm | ISO 14644-1 | / | ISO Class 2 | US FED 209E | / | US Class - | | certificate
1
de
(24-02-22)
statement
1
de
(24-02-22)
|