Particel emission (ISO 14644 part 14)
| full range (Z-Stage): s = 40 mm coarse speed/scanning speed (Z-Stage): 3600/15-30 µm / s full range (piezo electric stage): s = 200 µm coarse speed/scanning speed (piezo electric stage): 1000/15-30 µm / s MMR Während der Messung verwendetes Mehrfachmessrezept (MMR): • Z coord (first step: recipe 01 - 03): respectively 2 repetitions, changing position at coarse speed after every repetition • Z stage (second step: main loop recipe 01 - 03): respectively 50 repetitions, changing position at coarse speed after every repetition pump type: VT 4.4 (SN 2652823) Max. suction capacity (pump): Q = 4.1 m^3 / h Max. vacuum (pump): 150 mbar Microscope (6.7 acquisitions per minute; with suction): ISO Class 1 Controller: ISO Class 6 Computer: ISO Class 5 Display: ISO Class 2 | ISO 14644-1 | / | ISO Class 6 | | certificate
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