Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
ESD behaviour (DIN EN 61340-5-1)
| resistance to ground: < x 10E3 Ω | | certificate
1
de
(12-10-21)
certificate
1
en
(12-10-21)
statement
1
en
(12-10-21)
statement
1
de
(12-10-21)
|
ESD behaviour (SEMI E78)
| electrostatic level: 2018 / 18 nm electrostatic level: Level 1 | SEMI E78:0309 | / | eingehalten/conform | SEMI E78:0998 | / | eingehalten/conform | | certificate
1
de
(12-10-21)
certificate
1
en
(12-10-21)
statement
1
en
(12-10-21)
statement
1
de
(12-10-21)
|
Particle emission (VDI 2083 part 9.1)
| Moving axis: 1-6 Capacity: 40 % Attached payload: 3 kg Axis 1: -150 - 150 ° Axis 2: -30 -160 ° Axis 3: -160 - 90 ° Axis 4: -170 - 170 ° Axis 5: -90 - 90 ° Axis 6: -250 - 250 ° | ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | certificate
1
de
(12-10-21)
certificate
1
en
(12-10-21)
statement
1
de
(12-10-21)
statement
1
en
(12-10-21)
|
Moving axis: 1-6 Capacity: 80 % Attached payload: 3 kg Axis 1: -150 - 150 ° Axis 2: -30 -160 ° Axis 3: -160 - 90 ° Axis 4: -170 - 170 ° Axis 5: -90 - 90 ° Axis 6: -250 - 250 ° | ISO 14644-1 | / | ISO Class 6 | US FED 209E | / | US Class 1000 | |