Particle emission (VDI 2083 part 9.1)
| frequency (sinusoidal oscillation): 5 - 50 Hz oscillation velocity 365 µm/s oscillation acceleration: 109 mm/s² oscillation of the system: 1,1 µm | ISO 14644-1 | / | ISO Class 1 | US FED 209E | / | US Class - | | certificate
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statement
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