| Particel emission (ISO 14644 part 14)
| full range (Z-Stage): s = 40 mm
coarse speed/scanning speed (Z-Stage): 3600/15-30 µm / s
full range (piezo electric stage): s = 200 µm
coarse speed/scanning speed (piezo electric stage): 1000/15-30 µm / s
MMR Während der Messung verwendetes Mehrfachmessrezept (MMR):
• Z coord (first step: recipe 01 - 03): respectively 2 repetitions, changing position at coarse speed after every repetition
• Z stage (second step: main loop recipe 01 - 03): respectively 50 repetitions, changing position at coarse speed after every repetition
pump type: VT 4.4 (SN 2652823)
Max. suction capacity (pump): Q = 4.1 m^3 / h
Max. vacuum (pump): 150 mbar
Microscope (6.7 acquisitions per minute; with suction): ISO Class 1
Controller: ISO Class 6
Computer: ISO Class 5
Display: ISO Class 2
| | ISO 14644-1 | / | ISO Class 6 | | certificate
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