TESTED DEVICE®

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Company

Physik Instrumente (PI) GmbH & Co. KG
 
Auf der Roemerstrasse 1
76228 Karlsruhe

Contact Person

Mr. Steffen Arnold
Phone +49-721-48-46-235
Email S.Arnold@pi.ws
Website www.physikinstrumente.de

Test Object

Theta-Z-Stage with 100 µm Piezo
M-900K060
Q-Id PI 0208-267
Year 2002
Comments
Category Transfer Systems and Bearing

Tests And Results

Subject of Test Parameter Assessment for / Results Documents
(valid to)
Particle emission (VDI 2083 part 9.1) specified by customer
DIN EN ISO 14644-1 / ISO Class 5
US FED 209E / US Class 100
/
certificate 1 de
statement 1 de