Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Particle emission (VDI 2083 part 9.1)
| velocity 0.4 axis S, L, U, R, B, T | ISO 14644-1 | / | ISO Class 7 | US FED 209E | / | US Class 10000 | | certificate
1
en
certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| velocity 0.8 axis S, L, U, R, B, T | ISO 14644-1 | / | ISO Class 6 | US FED 209E | / | US Class 1000 | | certificate
1
en
certificate
1
de
statement
1
de
|
Particle emission (VDI 2083 part 9.1)
| velocity 0.4/0.8 axis U, R, B, T | ISO 14644-1 | / | ISO Class 5 | US FED 209E | / | US Class 100 | | certificate
1
en
certificate
1
de
statement
1
de
|