Report No.downup Manufacturerdownup Product Namedownup Subject of Test (Result)downup
MO 0912-499 Moser Systemelektrik Ceiling connection column
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
VA 0907-492 Von Ardenne Anlagentechnik GmbH Cable Guiding System
Power drag chain, designed to application inside PVD and PECVD reactor chambers
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
HI 0901-470 Hitachi Cable, Ltd. Hitaka Works Cable
RBT V series
Particle emission (VDI 2083 part 9.1) (ISO Class 1)
*Extract from VDI 2083 Part 9.1: "This guidline provides definitions of the terms "compatibility with the required cleanliness" and "cleanroom compatibility" and, based on these definitions, the classification and procedures serving to establish the suitability of equipment and air-handling components for use in environments whose air cleanliness and other parameters are assessed in accordance with technical rules (e.g. ISO 14644-1). For the purpose of this guideline, the classification is based on the particle emission.