TESTED DEVICE®
Report No. | Manufacturer | Product Name | Subject of Test (Result) |
---|---|---|---|
AS 1903-1104 | ASM AS GmbH & Co.KG | SIPLACE Wafer System Weight 3674kg Article number 519781 | Particel emission (ISO 14644 part 14) (ISO Class 3) |
Filters
Text
Suitable for use in cleanroom areas of air cleanliness class ... according to ISO 14644-1*
- All ISO Classes (1 Hits)
- ISO Class 3 or better (1 Hits)
- ISO Class 4 or better (1 Hits)
- ISO Class 5 or better (1 Hits)
- ISO Class 6 or better (1 Hits)
- ISO Class 7 or better (1 Hits)
- ISO Class 8 or better (1 Hits)
- ISO Class 9 or better (1 Hits)
Subject Of Test
Categories
- All (392 Hits)
- Cleanroom Facilities (89 Hits)
- Automation Components (110 Hits)
- Working Place and Operator (54 Hits)
- Materials (21 Hits)
- Process Equipment (28 Hits)
- Energy Supply (90 Hits)