Subject of Test | Parameter | Assessment for / Results | Documents (valid to) |
Expertise
| Number of wells 5472 Number of runs 19 Duration (total run) 27 min 00 s Processsimulation routine process Result see report | | certificate
1
en
(28-09-17)
statement
1
en
(28-09-17)
|
Expertise
| Number of PCA plates 20 Number of runs 4 Duration (total run) 27 min 40 s Processsimulation routine process Result see report | | certificate
1
en
(28-09-17)
statement
1
en
(28-09-17)
|
Computational Fluid Dynamics (CFD)
| Processsimulation routine process Operation removed roofing | | certificate
1
en
(28-09-17)
statement
1
en
(28-09-17)
|
Particle emission (VDI 2083 part 9.1)
| Processsimulation routine process Number of runs 4 Duration (total run) 27 min 40 s Result see report | | certificate
1
en
(28-09-17)
statement
1
en
(28-09-17)
|
Particle per wafer and pass (PWP)
| Processsimulation routine process Number of runs (cycle 1) 71 Number of runs (cycle 2) 74 Duration (total run) 27 min 40 s | Result | / | see report (acc. to ITRS 2001: 1 x 10 E-3 PWP/cm² for particle sizes >0.075µm) | | certificate
1
en
(28-09-17)
statement
1
en
(28-09-17)
|