Particel emission (ISO 14644 part 14)
| Structure-borne noise: approx. 5 to 50 Hz oscillation velocity 2 µm/s oscillation acceleration: 0.6 µm/s² oscillation of the system: 0.02 µm | ISO 14644-1 | / | ISO Class 1 | | certificate
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(28-02-23)
QLogo
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QLogo
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statement
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(28-02-23)
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