Particel emission (ISO 14644 part 14)
| Measunring place: UL6000 Fab Operation status: Ultra Pump Hipace80 (TMP): 1500 Hz Pump (TMP2): 1167 Hz Pump Neodry36G (forepump): 175 Hz Valve V2a, V2b, V4c, V11: offen Valve V5 - V10, V12 - V15: geschlossen | ISO 14644-1 | / | ISO Class 5 | | certificate
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statement
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