Particel emission (ISO 14644 part 14)
| Parameter Set: -- Cyclic travel length circuit board: 1230 mm Cyclic max. acceleration circuit board: 3 m/s² Cyclic max. velocity circuit board: 1 m/s CP20-Head cyclic time per circuit board: 58 s CPP-Head cyclic time per circuit board: 91 s Used head: -- Operation mode: -- Belt: -- Circuit board movement: -- | ISO 14644-1 | / | ISO Class -- | | certificate
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