| Particel emission (ISO 14644 part 14)
| Measunring place: UL6000 Fab
Operation status: Ultra
Pump Hipace80 (TMP): 1500 Hz
Pump (TMP2): 1167 Hz
Pump Neodry36G (forepump): 175 Hz
Valve V2a, V2b, V4c, V11: offen
Valve V5 - V10, V12 - V15: geschlossen
| | ISO 14644-1 | / | ISO Class 5 | | certificate
1
en
(16-12-27)
certificate
1
de
(16-12-27)
statement
1
de
(16-12-27)
statement
1
en
(16-12-27)
|
