Particle emission (VDI 2083 part 9.1)
| frequency (sinusoidal oscillation) 5 - 50 Hz oscillation velocity 1.276 mm/s oscillation acceleration 0.462 mm/s² oscillation of the system 0.00358 mm | ISO 14644-1 | / | ISO Class 1 | US FED 209E | / | US Class - | | certificate
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